Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520314 | High temperature electrostatic chuck bonding adhesive | Jennifer Y. Sun, Ren-Guan Duan | 2016-12-13 |
| 9520315 | Electrostatic chuck with internal flow adjustments for improved temperature distribution | Vijay D. Parkhe, Matthew J. Busche, Wendell Glenn Boyd, Jr., Konstantin Makhratchev, Masanori Ono | 2016-12-13 |