Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520315 | Electrostatic chuck with internal flow adjustments for improved temperature distribution | Vijay D. Parkhe, Matthew J. Busche, Senh Thach, Konstantin Makhratchev, Masanori Ono | 2016-12-13 |