Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9519210 | Voltage contrast characterization structures and methods for within chip process variation characterization | Yunsheng Song, Zhigang Song, Yongchun Xin | 2016-12-13 |
| 9390884 | Method of inspecting a semiconductor substrate | Eric C. Harley, Kevin T. Wu | 2016-07-12 |
| 9291665 | Evaluating transistors with e-beam inspection | Zhigang Song | 2016-03-22 |
| 9293382 | Voltage contrast inspection of deep trench isolation | Norbert Arnold, Jin Ping Liu, Brian W. Messenger | 2016-03-22 |