Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9293382 | Voltage contrast inspection of deep trench isolation | Norbert Arnold, Jin Ping Liu, Oliver D. Patterson | 2016-03-22 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9293382 | Voltage contrast inspection of deep trench isolation | Norbert Arnold, Jin Ping Liu, Oliver D. Patterson | 2016-03-22 |