Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9263240 | Dual zone temperature control of upper electrodes | Alexei Marakhtanov, Rajinder Dhindsa, Ryan Bise, Sang Ki Nam, Jim Rogers +5 more | 2016-02-16 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9263240 | Dual zone temperature control of upper electrodes | Alexei Marakhtanov, Rajinder Dhindsa, Ryan Bise, Sang Ki Nam, Jim Rogers +5 more | 2016-02-16 |