Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520315 | Electrostatic chuck with internal flow adjustments for improved temperature distribution | Vijay D. Parkhe, Matthew J. Busche, Wendell Glenn Boyd, Jr., Senh Thach, Masanori Ono | 2016-12-13 |
| 9472435 | Tunable temperature controlled substrate support assembly | Vijay D. Parkhe, Steven E. Babayan, Zhiqiang Guo, Phillip R. Sommer, Dan Marohl | 2016-10-18 |
| 9299539 | Method and apparatus for measuring wafer bias potential | John C. Valcore, Jr. | 2016-03-29 |
| 9281226 | Electrostatic chuck having reduced power loss | Jennifer Y. Sun | 2016-03-08 |