Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9472435 | Tunable temperature controlled substrate support assembly | Vijay D. Parkhe, Steven E. Babayan, Konstantin Makhratchev, Zhiqiang Guo, Dan Marohl | 2016-10-18 |
PS
Phillip R. Sommer
Overall (2016): #263,226 of 481,213Top 55%
1
Patents 2016