Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9519093 | Broadband and wide field angle compensator | Lawrence D. Rotter, Muzammil Arain, David Y. Wang | 2016-12-13 |
| 9506871 | Pulsed laser induced plasma light source | — | 2016-11-29 |
| 9404872 | Selectably configurable multiple mode spectroscopic ellipsometry | Haiming Wang, Guorong V. Zhuang, Shankar Krishnan, Johannes D. de Veer | 2016-08-02 |
| 9310290 | Multiple angles of incidence semiconductor metrology systems and methods | David Y. Wang, Lawrence D. Rotter, Shankar Krishnan, Johannes D. de Veer, Catalin Filip +3 more | 2016-04-12 |