Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9528183 | Cobalt removal for chamber clean or pre-clean process | Bo Zheng, Sang Ho Yu, Avgerinos V. Gelatos, Bhushan Zope, Jeffrey W. Anthis +1 more | 2016-12-27 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9528183 | Cobalt removal for chamber clean or pre-clean process | Bo Zheng, Sang Ho Yu, Avgerinos V. Gelatos, Bhushan Zope, Jeffrey W. Anthis +1 more | 2016-12-27 |