Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9412581 | Low-K dielectric gapfill by flowable deposition | Kiran V. Thadani, Young S. Lee, Mukund Srinivasan | 2016-08-09 |
| 9404178 | Surface treatment and deposition for reduced outgassing | Xiaolin Chen, Nitin K. Ingle, Shankar Venkataraman | 2016-08-02 |