Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9493343 | Planar cavity MEMS and related structures, methods of manufacture and design structures | Russell T. Herrin, Anthony K. Stamper | 2016-11-15 |
| 9455214 | Wafer frontside-backside through silicon via | Anthony K. Stamper, Zeljka Topic-Beganovic, Daniel S. Vanslette | 2016-09-27 |
| 9443764 | Method of eliminating poor reveal of through silicon vias | Anthony K. Stamper, Zeljka Topic-Beganovic, Daniel S. Vanslette | 2016-09-13 |
| 9406472 | Planar cavity MEMS and related structures, methods of manufacture and design structures | Dinh Dang, Thai Doan, George A. Dunbar, III, Zhong-Xiang He, Russell T. Herrin +5 more | 2016-08-02 |
| 9330856 | Methods of manufacture for micro-electro-mechanical system (MEMS) | Russell T. Herrin, Anthony K. Stamper | 2016-05-03 |