| 9513565 |
Using wafer geometry to improve scanner correction effectiveness for overlay control |
Craig MacNaughton, Sathish Veeraraghavan, Pradeep Vukkadala, Amir Azordegan |
2016-12-06 |
| 9430593 |
System and method to emulate finite element model based prediction of in-plane distortions due to semiconductor wafer chucking |
Pradeep Vukkadala, Sathish Veeraraghavan, Haiguang Chen, Michael D. Kirk |
2016-08-30 |
| 9373165 |
Enhanced patterned wafer geometry measurements based design improvements for optimal integrated chip fabrication performance |
Amir Azordegan, Pradeep Vukkadala, Craig MacNaughton |
2016-06-21 |
| 9354526 |
Overlay and semiconductor process control using a wafer geometry metric |
Pradeep Vukkadala, Sathish Veeraraghavan |
2016-05-31 |
| 9355440 |
Detection of selected defects in relatively noisy inspection data |
Haiguang Chen, Michael D. Kirk, Stephen Biellak |
2016-05-31 |