Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9341942 | Vacuum chamber assembly for supporting a workpiece | Fardad Hashemi | 2016-05-17 |
| 9323157 | Mirror assembly for an exposure apparatus | Alton H. Phillips | 2016-04-26 |
| 9304385 | Exposure method and device manufacturing method including selective deformation of a mask | Alton H. Phillips, Hiromitsu Yoshimoto, Yusaku Uehara | 2016-04-05 |
| 9304409 | Liquid jet and recovery system for immersion lithography | W. Thomas Novak, Andrew J. Hazelton | 2016-04-05 |
| 9298077 | Reaction assembly for a stage assembly | — | 2016-03-29 |