Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9304409 | Liquid jet and recovery system for immersion lithography | Andrew J. Hazelton, Douglas C. Watson | 2016-04-05 |
| 9244363 | Environmental system including a transport region for an immersion lithography apparatus | Andrew J. Hazelton, Michael Sogard | 2016-01-26 |