Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9304409 | Liquid jet and recovery system for immersion lithography | W. Thomas Novak, Douglas C. Watson | 2016-04-05 |
| 9244362 | Environmental system including vacuum scavenge for an immersion lithography apparatus | Michael Sogard | 2016-01-26 |
| 9244363 | Environmental system including a transport region for an immersion lithography apparatus | W. Thomas Novak, Michael Sogard | 2016-01-26 |