Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9529282 | Position-measurement systems | Motofusa Ishikawa | 2016-12-27 |
| 9513460 | Apparatus and methods for reducing autofocus error | — | 2016-12-06 |
| 9423704 | Apparatus and methods for measuring thermally induced reticle distortion | — | 2016-08-23 |
| 9335159 | Methods and devices for reducing errors in Goos-Hänchen corrections of displacement data | Daniel Gene Smith, David M. Williamson | 2016-05-10 |
| 9244362 | Environmental system including vacuum scavenge for an immersion lithography apparatus | Andrew J. Hazelton | 2016-01-26 |
| 9244363 | Environmental system including a transport region for an immersion lithography apparatus | W. Thomas Novak, Andrew J. Hazelton | 2016-01-26 |