Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9304385 | Exposure method and device manufacturing method including selective deformation of a mask | Alton H. Phillips, Douglas C. Watson, Hiromitsu Yoshimoto | 2016-04-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9304385 | Exposure method and device manufacturing method including selective deformation of a mask | Alton H. Phillips, Douglas C. Watson, Hiromitsu Yoshimoto | 2016-04-05 |