Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9329500 | Lithographic apparatus configured to reconstruct an aerial pattern and to compare the reconstructed aerial pattern with an aerial pattern detected by an image sensor | Frank Staals, Joeri Lof, Erik Roelof Loopstra, Wim Tjibbo Tel | 2016-05-03 |