Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9476122 | Wafer processing deposition shielding components | Martin Lee Riker, Keith A. Miller | 2016-10-25 |
| 9466524 | Method of depositing metals using high frequency plasma | Paul F. Ma, Guojun Liu, Annamalai Lakshmanan, Dien-Yeh Wu | 2016-10-11 |
| 9396933 | PVD buffer layers for LED fabrication | Mingwei Zhu, Rongjun Wang, Nag B. Patibandia, Xianmin Tang, Vivek Agrawal +5 more | 2016-07-19 |
| 9376752 | Edge ring for a deposition chamber | Ashish Goel | 2016-06-28 |