Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9530678 | Substrate carrier system for moving substrates in a vertical oven and method for processing substrates | Andreas Stefaner, Heimo Schieder, Roland Moennich, Anton Winkler | 2016-12-27 |
| 9511560 | Processing a sacrificial material during manufacture of a microfabricated product | Daniel Maurer, Thomas Grille, Joachim Hirschler, Markus Kahn | 2016-12-06 |
| 9515162 | Surface treatment of semiconductor substrate using free radical state fluorine particles | Maria Reiner, Clemens Ostermaier, Peter Lagger, Gerhard Prechtl, Oliver Haeberlen +2 more | 2016-12-06 |
| 9257342 | Methods of singulating substrates to form semiconductor devices using dummy material | Gudrun Stranzl, Martin Zgaga, Markus Kahn | 2016-02-09 |