Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9511560 | Processing a sacrificial material during manufacture of a microfabricated product | Guenter Denifl, Thomas Grille, Joachim Hirschler, Markus Kahn | 2016-12-06 |
| 9439017 | Method for manufacturing a plurality of microphone structures, microphone and mobile device | Ursula Hedenig, Thomas Grille, Peter Irsigler, Soenke Pirk, Andre Brockmeier | 2016-09-06 |