Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9515162 | Surface treatment of semiconductor substrate using free radical state fluorine particles | Clemens Ostermaier, Peter Lagger, Gerhard Prechtl, Oliver Haeberlen, Josef Schellander +2 more | 2016-12-06 |