Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9493879 | Selective sputtering for pattern transfer | Mark Hoinkis, Hiroyuki Miyazoe | 2016-11-15 |
| 9484220 | Sputter etch processing for heavy metal patterning in integrated circuits | Mark Hoinkis, Hiroyuki Miyazoe, Chun Yan | 2016-11-01 |
| 9472499 | Self-aligned pitch split for unidirectional metal wiring | Josephine B. Chang, Michael A. Guillorn, Hiroyuki Miyazoe | 2016-10-18 |
| 9299638 | Patterning transition metals in integrated circuits | Cyril Cabral, Jr., Sebastian U. Engelmann, Benjamin L. Fletcher, Michael S. Gordon | 2016-03-29 |
| 9299639 | Patterning transition metals in integrated circuits | Cyril Cabral, Jr., Sebastian U. Engelmann, Benjamin L. Fletcher, Michael S. Gordon | 2016-03-29 |
| 9263393 | Sputter and surface modification etch processing for metal patterning in integrated circuits | Cyril Cabral, Jr., Benjamin L. Fletcher, Nicholas C. M. Fuller, Hiroyuki Miyazoe | 2016-02-16 |