Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9346977 | Abrasive, abrasive set, and method for abrading substrate | Hisataka Minami, Tomohiro Iwano, Koji Fujisaki | 2016-05-24 |
| 9346978 | Slurry, polishing-solution set, polishing solution, substrate polishing method, and substrate | Tomohiro Iwano, Hisataka Minami, Koji Fujisaki | 2016-05-24 |
| 9293344 | Cmp polishing slurry and method of polishing substrate | Masato Fukasawa, Naoyuki Koyama, Yasushi Kurata, Kouji Haga, Yuuto Ootsuki | 2016-03-22 |