Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9299573 | Polishing method | Kouji Mishima, Masaya Nishiyama | 2016-03-29 |
| 9293344 | Cmp polishing slurry and method of polishing substrate | Naoyuki Koyama, Yasushi Kurata, Kouji Haga, Toshiaki Akutsu, Yuuto Ootsuki | 2016-03-22 |