Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9500945 | Pattern classification based proximity corrections for reticle fabrication | Guoxiang Ning, Paul Ackmann, Christian Buergel | 2016-11-22 |
| 9384318 | Mask error compensation by optical modeling calibration | Guoxiang Ning, Paul Ackmann | 2016-07-05 |
| 9329471 | Achieving a critical dimension target based on resist characteristics | Guoxiang Ning, Xintuo Dai, Huang Liu | 2016-05-03 |
| 9250538 | Efficient optical proximity correction repair flow method and apparatus | Guoxiang Ning, Christopher A. Spence, Paul Ackmann | 2016-02-02 |