Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9329471 | Achieving a critical dimension target based on resist characteristics | Guoxiang Ning, Huang Liu, Chin Teong Lim | 2016-05-03 |
| 9329495 | Overlay metrology system and method | Binbin Yan | 2016-05-03 |