Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9406117 | Inspection system and method for inspecting line width and/or positional errors of a pattern | Takanao Touya, Shuichi Tamamushi, Hidenori Sato, Hiroyuki Tanizaki, Takeshi Fujiwara +4 more | 2016-08-02 |