Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9494718 | Mirror for the EUV wavelength range, substrate for such a mirror, projection objective for microlithography comprising such a mirror or such a substrate, and projection exposure apparatus for microlithography comprising such a projection objective | Stephan Muellender, Wilfried Clauss, Hans-Jochen Paul, Gerhard Braun, Sascha Migura +4 more | 2016-11-15 |
| 9453749 | Hybrid sensing ultrasonic flowmeter | David E. Bachmann, Rolf Schmitt, Markus Hantzsch, Andreas Weber | 2016-09-27 |