Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9494718 | Mirror for the EUV wavelength range, substrate for such a mirror, projection objective for microlithography comprising such a mirror or such a substrate, and projection exposure apparatus for microlithography comprising such a projection objective | Stephan Muellender, Joern WEBER, Wilfried Clauss, Hans-Jochen Paul, Sascha Migura +4 more | 2016-11-15 |
| 9455609 | Electric motor with a power output stage and with efficient heat transport and method | Thomas Hennecke, Michael Heim, Hans Irion, Frank Wehrmann, Georg Voegele +3 more | 2016-09-27 |
| 9281270 | Method for making contact with a semiconductor and contact arrangement for a semiconductor | Eckart Geinitz, Erik Sueske | 2016-03-08 |