Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9500957 | Arrangement for thermal actuation of a mirror in a microlithographic projection exposure apparatus | — | 2016-11-22 |
| 9482959 | EUV microlithography illumination optical system and EUV attenuator for same | Nicolas Schmidts, Ulrich Bingel, Boaz Pnini-Mittler | 2016-11-01 |
| 9465208 | Facet mirror device | Martin Vogt | 2016-10-11 |
| 9423590 | Liquid cooled EUV reflector | Damian Fiolka, Boaz Pnini-Mittler | 2016-08-23 |