Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9482959 | EUV microlithography illumination optical system and EUV attenuator for same | Nicolas Schmidts, Joachim Hartjes, Ulrich Bingel | 2016-11-01 |
| 9423590 | Liquid cooled EUV reflector | Joachim Hartjes, Damian Fiolka | 2016-08-23 |
| 9274256 | Systems for aligning an optical element and method for same | — | 2016-03-01 |