Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9482959 | EUV microlithography illumination optical system and EUV attenuator for same | Nicolas Schmidts, Joachim Hartjes, Boaz Pnini-Mittler | 2016-11-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9482959 | EUV microlithography illumination optical system and EUV attenuator for same | Nicolas Schmidts, Joachim Hartjes, Boaz Pnini-Mittler | 2016-11-01 |