Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9383544 | Optical system for semiconductor lithography | Yim-Bun Patrick Kwan, Stefan Xalter, Damian Fiolka | 2016-07-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9383544 | Optical system for semiconductor lithography | Yim-Bun Patrick Kwan, Stefan Xalter, Damian Fiolka | 2016-07-05 |