Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9423700 | Lithography apparatus, lithography method, lithography system, storage medium, and article manufacturing method | Noburu Takakura, Akihiko Kawamura | 2016-08-23 |
| 9261802 | Lithography apparatus, alignment method, and method of manufacturing article | Kazuhiko Mishima | 2016-02-16 |