Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9423700 | Lithography apparatus, lithography method, lithography system, storage medium, and article manufacturing method | Shinichiro Koga, Akihiko Kawamura | 2016-08-23 |
NT
Noburu Takakura
Overall (2016): #274,696 of 481,213Top 60%
1
Patents 2016