Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9423700 | Lithography apparatus, lithography method, lithography system, storage medium, and article manufacturing method | Shinichiro Koga, Noburu Takakura | 2016-08-23 |
| 9377702 | Patterning method, lithography apparatus and system, and article manufacturing method | — | 2016-06-28 |