Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9400434 | Exposure apparatus, exposure method, and device manufacturing method | Tsutomu Takenaka | 2016-07-26 |
| 9283720 | Position detection apparatus, imprint apparatus, and position detection method | Ken Minoda, Yoshihiro Shiode, Hironori Maeda | 2016-03-15 |
| 9261802 | Lithography apparatus, alignment method, and method of manufacturing article | Shinichiro Koga | 2016-02-16 |