Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9523927 | Exposure apparatus with detection apparatus for detection of upper and lower surface marks, and device manufacturing method | — | 2016-12-20 |
| 9400436 | Detection device, exposure apparatus, and device manufacturing method using same | — | 2016-07-26 |
| 9291921 | Detection apparatus, exposure apparatus, device fabrication method and filter to reduce a difference between detected intensity values of lights having different wavelength ranges | — | 2016-03-22 |
| 9283720 | Position detection apparatus, imprint apparatus, and position detection method | Ken Minoda, Yoshihiro Shiode, Kazuhiko Mishima | 2016-03-15 |
| 9274911 | Using shared pins in a concurrent test execution environment | Mark Elston, Harsanjeet Singh, Ankan Pramanick, Leon Chen, Chandra Pinjala +1 more | 2016-03-01 |