Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9373532 | Guide apparatus, exposure apparatus, and method of manufacturing article | Akira Morohashi | 2016-06-21 |
| 9310688 | Processing apparatus and article manufacturing method using same | Daisuke Iwase | 2016-04-12 |
| 9280066 | Stage apparatus, lithography apparatus and method of manufacturing article | Hiroshi Kii | 2016-03-08 |
| 9280068 | Stage apparatus with flexible utility line, lithography apparatus, and article manufacturing method | Akira Morohashi, Tadashi Kimura | 2016-03-08 |