Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9373532 | Guide apparatus, exposure apparatus, and method of manufacturing article | Nobushige Korenaga | 2016-06-21 |
| 9280068 | Stage apparatus with flexible utility line, lithography apparatus, and article manufacturing method | Tadashi Kimura, Nobushige Korenaga | 2016-03-08 |