Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9280068 | Stage apparatus with flexible utility line, lithography apparatus, and article manufacturing method | Akira Morohashi, Nobushige Korenaga | 2016-03-08 |
TK
Tadashi Kimura
Overall (2016): #212,080 of 481,213Top 45%
1
Patents 2016