Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9280066 | Stage apparatus, lithography apparatus and method of manufacturing article | Nobushige Korenaga | 2016-03-08 |
HK
Hiroshi Kii
Overall (2016): #381,521 of 481,213Top 80%
1
Patents 2016