Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9499698 | Metal hardmask composition and processes for forming fine patterns on semiconductor substrates | Huirong Yao, Elizabeth WOLFER, Alberto D. Dioses, JoonYeon Cho | 2016-11-22 |
| 9418836 | Polyoxometalate and heteropolyoxometalate compositions and methods for their use | Venkata Gopal Reddy Chada, Huirong Yao, Munirathna Padmanaban, JoonYeon Cho, Elizabeth WOLFER +1 more | 2016-08-16 |
| 9409793 | Spin coatable metallic hard mask compositions and processes thereof | Venkata Gopal Reddy Chada, Huirong Yao, Elizabeth WOLFER, Alberto D. Dioses, JoonYeon Cho +1 more | 2016-08-09 |
| 9315636 | Stable metal compounds, their compositions and methods | Huirong Yao, M. Dalil Rahman, JoonYeon Cho, Clement Anyadiegwu, Munirathna Padmanaban | 2016-04-19 |
| 9296922 | Stable metal compounds as hardmasks and filling materials, their compositions and methods of use | Huirong Yao, Elizabeth WOLFER, Douglas McKenzie, JoonYeon Cho, Munirathna Padmanaban | 2016-03-29 |
| 9274426 | Antireflective coating compositions and processes thereof | M. Dalil Rahman, Takanori Kudo, Alberto D. Dioses, Douglas McKenzie, Clement Anyadiegwu +1 more | 2016-03-01 |