Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9499698 | Metal hardmask composition and processes for forming fine patterns on semiconductor substrates | Huirong Yao, Elizabeth WOLFER, Salem K. Mullen, JoonYeon Cho | 2016-11-22 |
| 9418836 | Polyoxometalate and heteropolyoxometalate compositions and methods for their use | Venkata Gopal Reddy Chada, Huirong Yao, Munirathna Padmanaban, JoonYeon Cho, Elizabeth WOLFER +1 more | 2016-08-16 |
| 9409793 | Spin coatable metallic hard mask compositions and processes thereof | Venkata Gopal Reddy Chada, Huirong Yao, Salem K. Mullen, Elizabeth WOLFER, JoonYeon Cho +1 more | 2016-08-09 |
| 9274426 | Antireflective coating compositions and processes thereof | M. Dalil Rahman, Takanori Kudo, Douglas McKenzie, Clement Anyadiegwu, Munirathna Padmanaban +1 more | 2016-03-01 |