Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9296922 | Stable metal compounds as hardmasks and filling materials, their compositions and methods of use | Huirong Yao, Salem K. Mullen, Elizabeth WOLFER, JoonYeon Cho, Munirathna Padmanaban | 2016-03-29 |
| 9274426 | Antireflective coating compositions and processes thereof | M. Dalil Rahman, Takanori Kudo, Alberto D. Dioses, Clement Anyadiegwu, Munirathna Padmanaban +1 more | 2016-03-01 |