Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9499698 | Metal hardmask composition and processes for forming fine patterns on semiconductor substrates | Huirong Yao, Salem K. Mullen, Alberto D. Dioses, JoonYeon Cho | 2016-11-22 |
| 9418836 | Polyoxometalate and heteropolyoxometalate compositions and methods for their use | Venkata Gopal Reddy Chada, Huirong Yao, Munirathna Padmanaban, JoonYeon Cho, Alberto D. Dioses +1 more | 2016-08-16 |
| 9409793 | Spin coatable metallic hard mask compositions and processes thereof | Venkata Gopal Reddy Chada, Huirong Yao, Salem K. Mullen, Alberto D. Dioses, JoonYeon Cho +1 more | 2016-08-09 |
| 9296922 | Stable metal compounds as hardmasks and filling materials, their compositions and methods of use | Huirong Yao, Salem K. Mullen, Douglas McKenzie, JoonYeon Cho, Munirathna Padmanaban | 2016-03-29 |