Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9394609 | Atomic layer deposition of aluminum fluoride thin films | Miia Mäntymäki, Mikko Ritala | 2016-07-19 |
| 9382615 | Vapor deposition of LiF thin films | Miia Mäntymäki, Jani Hamalainen, Mikko Ritala | 2016-07-05 |
| 9365926 | Precursors and methods for atomic layer deposition of transition metal oxides | Timo Hatanpää, Jaakko Niinisto, Mikko Ritala, Suvi Haukka | 2016-06-14 |
| 9315894 | Atomic layer deposition of metal phosphates and lithium silicates | Jani Hamalainen, Jani Holopainen, Timo Hatanpää, Mikko Ritala | 2016-04-19 |
| 9315896 | Synthesis and use of precursors for ALD of group VA element containing thin films | Viljami Pore, Timo Hatanpää, Mikko Ritala | 2016-04-19 |