Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9365926 | Precursors and methods for atomic layer deposition of transition metal oxides | Jaakko Niinisto, Mikko Ritala, Markku Leskelä, Suvi Haukka | 2016-06-14 |
| 9315894 | Atomic layer deposition of metal phosphates and lithium silicates | Jani Hamalainen, Jani Holopainen, Mikko Ritala, Markku Leskelä | 2016-04-19 |
| 9315896 | Synthesis and use of precursors for ALD of group VA element containing thin films | Viljami Pore, Mikko Ritala, Markku Leskelä | 2016-04-19 |