Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9382615 | Vapor deposition of LiF thin films | Miia Mäntymäki, Mikko Ritala, Markku Leskelä | 2016-07-05 |
| 9315894 | Atomic layer deposition of metal phosphates and lithium silicates | Jani Holopainen, Timo Hatanpää, Mikko Ritala, Markku Leskelä | 2016-04-19 |